Open Access

Table 2

Low temperature oxidation conditions and 900 °C oxidation results for the test matrix.

470 °C wet-air oxidation 900 °C steam oxydation


Test Matrix Sample Time ZrO2 layer thickness
±1 μm
Time ZrO2 layer thickness
±1 μm
α(O) layer thickness
±1 μm
[H] Measured ECR
(#) (#) (days) (μm) (min) (μm) (μm) (wppm) (%)
1 CCT1 15 8 15 8 28 430 ± 50 1.2
CCT2 15 8 30 10 22 590 ± 60 3.2
CCT3 15 8 15 8 28 430 ± 40 1.2
CCT4 15 8 30 10 30 610 ± 80 3.2
2 CCT5 15 7.5 5 7.5 19 370 ± 50 0.0
CCT6 15 7.5 15 9.5 31 630 ± 100 1.2
CCT7 15 6.5 30 9.5 36 700 ± 90 3.4
CCT8 20 9.5 60 22 26 970 ± 110 5.5
CCT9 20 9.5 60 22 27 1060 ± 110 5.5
CCT10 20 9.5 60 24.5 27 1030 ± 100 5.5
3 AT1 20 9.5 60 22 30 970 ± 120 5.5
AT2 20 9.5 1060 ± 110 5.5
AT3 20 10 60 27.5 26 1070 ± 120 5.5
AT4 15 8 5 7.5 12 370 ± 50 0.0
AT5 15 8 15 9.5 19 630 ± 100 1.2
AT6 15 8 30 9.5 36 700 ± 160 3.4
AT7 0 0 15 13 21 40 ± 20 3.8
AT8 0 0 30 16.5 20 40 ± 10 4.8

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