Characterization of the ion-amorphization process and thermal annealing effects on third generation SiC fibers and 6H-SiC

Open Access

Fig. 6

TEM images and SAED patterns obtained from the irradiated 6H-SiC and SiC fibers with 4 MeV Au³⁺ ions at RT to 2 × 10¹⁵ cm⁻². The concentric and diffuse rings in SAED patterns indicate that the irradiated layer is completely amorphous (a-SiC). nc-SiC: nano-crystalline SiC (adapted from Ref. [5]).

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